Yuji Hirao

Follow

Person

Kobe, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of and apparatus for determining residual damage to wafer edges
- Patent number 5,790,252
- Issue date Aug 4, 1998
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Masumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for measuring lifetime of carriers in semic...
- Patent number 5,760,597
- Issue date Jun 2, 1998
- Kabushiki Kaisha Kobe Seiko Sho
- Naoyuki Yoshida
- G01 - MEASURING TESTING