Yuji Hirato

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Patents Grantslast 30 patents

Information Patent Grant
Schedule making device, substrate processing apparatus, schedule ma...
- Patent number 9,921,570
- Issue date Mar 20, 2018
- SCREEN Holdings Co., Ltd.
- Yuji Hirato
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SCHEDULE MAKING DEVICE, SUBSTRATE PROCESSING APPARATUS, SCHEDULE MA...
- Publication number 20150268660
- Publication date Sep 24, 2015
- SCREEN HOLDINGS CO., LTD.
- Yuji Hirato
- G05 - CONTROLLING REGULATING