Yuji Kakazu

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Patents Grantslast 30 patents

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Method of processing resist onto substrate and resist processing ap...
- Patent number 6,097,469
- Issue date Aug 1, 2000
- Tokyo Electron Limited
- Hidetami Yaegashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of processing resist utilizing alkaline component monitoring
- Patent number 6,017,663
- Issue date Jan 25, 2000
- Tokyo Electron Limited
- Hidetami Yaegashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of processing resist utilizing alkaline component monitoring
- Patent number 5,932,380
- Issue date Aug 3, 1999
- Tokyo Electron Limited
- Hidetami Yaegashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Filter device
- Patent number 5,434,644
- Issue date Jul 18, 1995
- Tokyo Electron Limited
- Junichi Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY