Membership
Tour
Register
Log in
Yuji Kamikawa
Follow
Person
Saga, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Nozzle cleaning device, nozzle cleaning method, and substrate proce...
Patent number
10,700,166
Issue date
Jun 30, 2020
Tokyo Electron Limited
Yoshihiro Kai
B08 - CLEANING
Information
Patent Grant
Substrate cleaning method, substrate cleaning system and program st...
Patent number
9,358,588
Issue date
Jun 7, 2016
Tokyo Electron Limited
Tsukasa Watanabe
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
9,305,818
Issue date
Apr 5, 2016
Tokyo Electron Limited
Yuji Kamikawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
9,236,280
Issue date
Jan 12, 2016
Tokyo Electron Limited
Takayuki Toshima
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
9,004,079
Issue date
Apr 14, 2015
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evaporator, evaporation method and substrate processing apparatus
Patent number
9,003,674
Issue date
Apr 14, 2015
Tokyo Electron Limited
Mikio Nakashima
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate processing apparatus, substrate processing method and sto...
Patent number
8,944,078
Issue date
Feb 3, 2015
Tokyo Electron Limited
Yuji Kamikawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate processing apparatus
Patent number
8,851,819
Issue date
Oct 7, 2014
Tokyo Electron Limited
Yuji Kamikawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Liquid processing apparatus, liquid processing method, computer pro...
Patent number
8,577,502
Issue date
Nov 5, 2013
Tokyo Electron Limited
Hiroshi Tanaka
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Evaporator, evaporation method and substrate processing apparatus
Patent number
8,567,089
Issue date
Oct 29, 2013
Tokyo Electron Limited
Mikio Nakashima
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and stor...
Patent number
8,567,417
Issue date
Oct 29, 2013
Tokyo Electron Limited
Yuji Kamikawa
B08 - CLEANING
Information
Patent Grant
Liquid processing apparatus and process liquid supplying method
Patent number
8,491,726
Issue date
Jul 23, 2013
Tokyo Electron Limited
Yuji Kamikawa
B08 - CLEANING
Information
Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
Patent number
8,371,318
Issue date
Feb 12, 2013
Tokyo Electron Limited
Teruomi Minami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method, substrate cleaning system and program st...
Patent number
8,347,901
Issue date
Jan 8, 2013
Tokyo Electron Limited
Tsukasa Watanabe
B08 - CLEANING
Information
Patent Grant
Substrate processing method and non-transitory storage medium for c...
Patent number
8,303,724
Issue date
Nov 6, 2012
Tokyo Electron Limited
Koukichi Hiroshiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Evaporator, evaporation method and substrate processing apparatus
Patent number
8,281,498
Issue date
Oct 9, 2012
Tokyo Electron Limited
Mikio Nakashima
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
Patent number
8,268,087
Issue date
Sep 18, 2012
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid treating apparatus
Patent number
8,201,567
Issue date
Jun 19, 2012
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method, substrate cleaning system and program st...
Patent number
8,152,928
Issue date
Apr 10, 2012
Tokyo Electron Limited
Tsukasa Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus including a drying mechanism using a...
Patent number
8,015,984
Issue date
Sep 13, 2011
Tokyo Electron Limited
Koukichi Hiroshiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Batch forming apparatus, substrate processing system, batch forming...
Patent number
8,002,511
Issue date
Aug 23, 2011
Tokyo Electron Limited
Yuji Kamikawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Semiconductor device fabricating system
Patent number
7,972,468
Issue date
Jul 5, 2011
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vapor drying method, apparatus and recording medium for use in the...
Patent number
7,637,029
Issue date
Dec 29, 2009
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fluid heating apparatus
Patent number
7,593,625
Issue date
Sep 22, 2009
Tokyo Electron Limited
Yuji Kamikawa
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Liquid processing apparatus and method
Patent number
7,412,981
Issue date
Aug 19, 2008
Tokyo Electron Limited
Koji Egashira
B08 - CLEANING
Information
Patent Grant
Substrate processing system and substrate processing method
Patent number
7,404,409
Issue date
Jul 29, 2008
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rotary shaft sealing mechanism and liquid processing apparatus
Patent number
7,347,214
Issue date
Mar 25, 2008
Tokyo Electron Limited
Koji Egashira
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Liquid processing apparatus and liquid processing method
Patent number
7,337,792
Issue date
Mar 4, 2008
Tokyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing apparatus with nozzle having planar ejecting orif...
Patent number
7,314,054
Issue date
Jan 1, 2008
Tokyo Electron Limited
Koji Egashira
B08 - CLEANING
Information
Patent Grant
Liquid processing apparatus
Patent number
7,284,560
Issue date
Oct 23, 2007
Toktyo Electron Limited
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20140356106
Publication date
Dec 4, 2014
TOKYO ELECTRON LIMITED
Yuji KAMIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EVAPORATOR, EVAPORATION METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20140020849
Publication date
Jan 23, 2014
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
NOZZLE CLEANING DEVICE, NOZZLE CLEANING METHOD, AND SUBSTRATE PROCE...
Publication number
20130319470
Publication date
Dec 5, 2013
TOKYO ELECTRON LIMITED
Yoshihiro Kai
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM AND PROGRAM ST...
Publication number
20130152964
Publication date
Jun 20, 2013
TOKYO ELECTRON LIMITED
Tsukasa WATANABE
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
EVAPORATOR, EVAPORATION METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20120323052
Publication date
Dec 20, 2012
Mikio NAKASHIMA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
Publication number
20120312332
Publication date
Dec 13, 2012
TOKYO ELECTRON LIMITED
Teruomi Minami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method, and St...
Publication number
20120132230
Publication date
May 31, 2012
TOKYO ELECTRON LIMITED
Takayuki Toshima
B08 - CLEANING
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method, and Co...
Publication number
20120006356
Publication date
Jan 12, 2012
TOKYO ELECTRON LIMITED
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY STORAGE MEDIUM FOR C...
Publication number
20110290280
Publication date
Dec 1, 2011
TOKYO ELECTRON LIMITED
Koukichi HIROSHIRO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20110247662
Publication date
Oct 13, 2011
TOKYO ELECTRON LIMITED
Yuji KAMIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
Publication number
20110240066
Publication date
Oct 6, 2011
TOKYO ELECTRON LIMITED
Yuji KAMIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRASONIC CLEANING APPARATUS, ULTRASONIC CLEANING METHOD, AND STOR...
Publication number
20110079240
Publication date
Apr 7, 2011
TOKYO ELECTRON LIMITED
Yuji KAMIKAWA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20100215461
Publication date
Aug 26, 2010
TOKYO ELECTRON LIMITED
Yuji KAMIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
Publication number
20100147335
Publication date
Jun 17, 2010
TOKYO ELECTRON LIMITED
Norihiro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20100095981
Publication date
Apr 22, 2010
TOKYO ELECTRON LIMITED
Yuji KAMIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
Publication number
20100083986
Publication date
Apr 8, 2010
TOKYO ELECTRON LIMITED
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EVAPORATOR, EVAPORATION METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100058606
Publication date
Mar 11, 2010
TOKYO ELECTRON LIMITED
Mikio NAKASHIMA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
Publication number
20090265039
Publication date
Oct 22, 2009
TOKYO ELECTRON LIMITED
Yuji Kamikawa
G05 - CONTROLLING REGULATING
Information
Patent Application
Liquid treating apparatus
Publication number
20090151756
Publication date
Jun 18, 2009
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Processing Apparatus and Substrate Processing Method
Publication number
20090101186
Publication date
Apr 23, 2009
Koukichi Hiroshiro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Liquid processing apparatus and process liquid supplying method
Publication number
20090078287
Publication date
Mar 26, 2009
TOKYO ELECTRON LIMITED
Yuji Kamikawa
B08 - CLEANING
Information
Patent Application
Liquid processing apparatus, liquid processing method, and storage...
Publication number
20090056764
Publication date
Mar 5, 2009
TOKYO ELECTRON LIMITED
Teruomi Minami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Batch forming apparatus, substrate processing system, batch forming...
Publication number
20090010748
Publication date
Jan 8, 2009
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Liquid processing apparatus, liquid processing method, computer pro...
Publication number
20080097647
Publication date
Apr 24, 2008
TOKYO ELECTRON LIMITED
Hiroshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device fabricating system
Publication number
20080041525
Publication date
Feb 21, 2008
TOKYO ELECTRON LIMITED
Yuji Kamikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate cleaning method, substrate cleaning system and program st...
Publication number
20070267040
Publication date
Nov 22, 2007
TOKYO ELECTRON LIMITED
Tsukasa Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate cleaning method, substrate cleaning system and program st...
Publication number
20070215172
Publication date
Sep 20, 2007
Tsukasa Watanabe
B08 - CLEANING
Information
Patent Application
Substrate processing apparatus for resist film removal
Publication number
20070204885
Publication date
Sep 6, 2007
TOKYO ELECTRON LIMITED
Takayuki Toshima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Liquid processing apparatus and method
Publication number
20070028950
Publication date
Feb 8, 2007
Koji Egashira
B08 - CLEANING
Information
Patent Application
Fluid heating apparatus
Publication number
20070017502
Publication date
Jan 25, 2007
Yuji Kamikawa
F28 - HEAT EXCHANGE IN GENERAL