Yuji Kobiyama

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for analyzing a group of photolithographic masks
- Patent number 8,264,535
- Issue date Sep 11, 2012
- Carl Zeiss SMS GmbH
- Oliver Kienzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR ANALYZING A GROUP OF PHOTOLITHOGRAPHIC MASKS
- Publication number 20100157046
- Publication date Jun 24, 2010
- Oliver Kienzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY