Yuji NAGASHIMA

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 10,460,961
- Issue date Oct 29, 2019
- Shibaura Mechatronics Corporation
- Yuji Nagashima
- B08 - CLEANING
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 10,406,566
- Issue date Sep 10, 2019
- SHIBAURA MECHATRONICS CORPORATION
- Jun Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,325,787
- Issue date Jun 18, 2019
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,281,210
- Issue date May 7, 2019
- Shibaura Mechatronics Corporation
- Kunihiro Miyazaki
- F26 - DRYING
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 10,276,406
- Issue date Apr 30, 2019
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke Hayashi
- B08 - CLEANING
Information Patent Grant
Device and method for treating a substrate with hydrofluoric and ni...
- Patent number 9,972,513
- Issue date May 15, 2018
- Shibaura Mechatronics Corporation
- Yuki Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,966,282
- Issue date May 8, 2018
- Shibaura Mechatronics Corporation
- Kunihiro Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 9,607,865
- Issue date Mar 28, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 9,553,003
- Issue date Jan 24, 2017
- Shibaura Mechatronics Corporation
- Konosuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment device and substrate treatment method
- Patent number 9,240,314
- Issue date Jan 19, 2016
- Shibaura Mechatronics Corporation
- Yoshiaki Kurokawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20220037149
- Publication date Feb 3, 2022
- SHIBAURA MECHATRONICS CORPORATION
- Yuji NAGASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180096864
- Publication date Apr 5, 2018
- SHIBAURA MECHATRONICS CORPORATION
- Yuji Nagashima
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20170259308
- Publication date Sep 14, 2017
- SHIBAURA MECHATRONICS CORPORATION
- Jun MATSUSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATING METHOD
- Publication number 20170256423
- Publication date Sep 7, 2017
- SHIBAURA MECHATRONICS CORPORATION
- Yuki SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160093486
- Publication date Mar 31, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Kunihiro MIYAZAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160025409
- Publication date Jan 28, 2016
- SHIBAURA MECHATRONICS CORPORATION
- Kunihiro MIYAZAKI
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090297
- Publication date Apr 2, 2015
- SHIBAURA MECHATRONICS CORPORATION
- Jun MATSUSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090298
- Publication date Apr 2, 2015
- Shibaura Mechantronics Corporation
- Yuji NAGASHIMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20150090296
- Publication date Apr 2, 2015
- SHIBAURA MECHATRONICS CORPORATION
- Yuji NAGASHIMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261549
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261554
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20140261566
- Publication date Sep 18, 2014
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD
- Publication number 20130025636
- Publication date Jan 31, 2013
- Yoshiaki Kurokawa
- H01 - BASIC ELECTRIC ELEMENTS

Yuji NAGASHIMA

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing device and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing device and substrate processing method

Device and method for treating a substrate with hydrofluoric and ni...

Substrate processing apparatus and substrate processing method

Substrate processing device and substrate processing method

Substrate processing device and substrate processing method

Substrate treatment device and substrate treatment method

Patents Applicationslast 30 patents

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD