Yuji NAGATANI

Person

Hikari, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,643,727
- Issue date May 9, 2023
- HITACHI HIGH-TECH CORPORATION
- Akira Kagoshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,184,182
- Issue date Jan 22, 2019
- Hitachi High-Technologies Corporation
- Akira Kagoshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,153,217
- Issue date Dec 11, 2018
- Hitachi High-Technologies Corporation
- Daisuke Shiraishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 9,824,866
- Issue date Nov 21, 2017
- Hitachi High-Technologies Corporation
- Akira Kagoshima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,828,184
- Issue date Sep 9, 2014
- Hitachi High-Technologies Corporation
- Akira Kagoshima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS DIAGNOSTIC SYSTEM, APPARATUS DIAGNOSTIC APPARATUS, SEMICO...
- Publication number 20240310827
- Publication date Sep 19, 2024
- Hitachi High-Tech Corporation
- Nanako Tamari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190100840
- Publication date Apr 4, 2019
- Hitachi High-Technologies Corporation
- Akira KAGOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20180068909
- Publication date Mar 8, 2018
- Hitachi High-Technologies Corporation
- Daisuke SHIRAISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA MANAGEMENT APPARATUS AND MONITORING METHOD OF SAME
- Publication number 20170230271
- Publication date Aug 10, 2017
- Hitachi High-Technologies Corporation
- Akira KAGOSHIMA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20160155611
- Publication date Jun 2, 2016
- Hitachi High-Technologies Corporation
- Akira KAGOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Method
- Publication number 20140339193
- Publication date Nov 20, 2014
- Akira Kagoshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20130119016
- Publication date May 16, 2013
- Hitachi High-Technologies Corporation
- Akira KAGOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS

Yuji NAGATANI

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Plasma processing method

Plasma processing apparatus and plasma processing method

Patents Applicationslast 30 patents

APPARATUS DIAGNOSTIC SYSTEM, APPARATUS DIAGNOSTIC APPARATUS, SEMICO...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

DATA MANAGEMENT APPARATUS AND MONITORING METHOD OF SAME

PLASMA PROCESSING APPARATUS

Plasma Processing Method

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD