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Yuji OBATA
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Yamanashi, JP
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Patents Grants
last 30 patents
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Patent Grant
Gas supply apparatus, gas supply method, and substrate processing a...
Patent number
11,987,885
Issue date
May 21, 2024
Tokyo Electron Limited
Yuji Obata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR ESTIMATING REMAINING AMOUNT OF SOLID RAW MATAERIAL, METH...
Publication number
20230366084
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Yuji OBATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWER PLATE AND FILM DEPOSITION APPARATUS
Publication number
20230212748
Publication date
Jul 6, 2023
TOKYO ELECTRON LIMITED
Yuji OBATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY APPARATUS, GAS SUPPLY METHOD, AND SUBSTRATE PROCESSING A...
Publication number
20220316060
Publication date
Oct 6, 2022
TOKYO ELECTRON LIMITED
Yuji OBATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
Publication number
20220178029
Publication date
Jun 9, 2022
TOKYO ELECTRON LIMITED
Yuji OBATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...