TREA

Yuji Obata

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Microwave irradiation apparatus
    • Patent number 9,224,623
    • Issue date Dec 29, 2015
    • Tokyo Electron Limited
    • Shigeru Kasai
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

  • Information Patent Application

    MICROWAVE IRRADIATION APPARATUS
    • Publication number 20120211486
    • Publication date Aug 23, 2012
    • TOKYO ELECTRON LIMITED
    • Shigeru Kasai
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR