Yuji Okubo

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Patents Grantslast 30 patents

Information Patent Grant
Reclaiming processing method for delaminated wafer
- Patent number 9,496,130
- Issue date Nov 15, 2016
- Shin-Etsu Handotai Co., Ltd.
- Toru Ishizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon epitaxial wafer and its manufacturing method
- Patent number 6,458,205
- Issue date Oct 1, 2002
- Shin-Etsu Handotai Co., Ltd.
- Koichi Hasegawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Gas supplying apparatus and vapor-phase growth plant
- Patent number 6,071,349
- Issue date Jun 6, 2000
- Shin-Etsu Handotai Co., Ltd.
- Yasushi Kurosawa
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
RECLAIMING PROCESSING METHOD FOR DELAMINATED WAFER
- Publication number 20140273400
- Publication date Sep 18, 2014
- Shin-Etsu Handotai Co., Ltd.
- Toru Ishizuka
- H01 - BASIC ELECTRIC ELEMENTS