Yuji ONUMA

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Kurokawa-gun, Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for plasma processing
- Patent number 11,646,178
- Issue date May 9, 2023
- Tokyo Electron Limited
- Yuji Onuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave output device and plasma processing device
- Patent number 11,031,213
- Issue date Jun 8, 2021
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PLASMA PROCESSING
- Publication number 20210351012
- Publication date Nov 11, 2021
- TOKYO ELECTRON LIMITED
- Yuji ONUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING DEVICE
- Publication number 20200013587
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS