Yuji Otsuka

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Microwave automatic matcher and plasma processing apparatus
- Patent number 10,109,463
- Issue date Oct 23, 2018
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method
- Patent number 9,412,607
- Issue date Aug 9, 2016
- Tokyo Electron Limited
- Tomiko Kamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method, semiconductor device manufacturing method an...
- Patent number 9,039,909
- Issue date May 26, 2015
- Tokyo Electron Limited
- Akira Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and apparatus
- Patent number 8,277,673
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Hiroshi Tsujimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE AUTOMATIC MATCHER AND PLASMA PROCESSING APPARATUS
- Publication number 20160268101
- Publication date Sep 15, 2016
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20140332372
- Publication date Nov 13, 2014
- TOKYO ELECTRON LIMITED
- Tomiko Kamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AN...
- Publication number 20120220135
- Publication date Aug 30, 2012
- TOKYO ELECTRON LIMITED
- Akira Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND APPARATUS
- Publication number 20100025372
- Publication date Feb 4, 2010
- TOKYO ELECTON LIMITED
- Hiroshi Tsujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20090242128
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Kenji TAGO
- H01 - BASIC ELECTRIC ELEMENTS