Yuji OTSUKI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,626,330
- Issue date Apr 11, 2023
- Tokyo Electron Limited
- Yuji Otsuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240371631
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
- Publication number 20240087885
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210398863
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Yuji OTSUKI
- G01 - MEASURING TESTING