Yuji SAKAI

Follow

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,273,464
- Issue date Mar 15, 2022
- Tokyo Electron Limited
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Solution treatment apparatus and cleaning method for solution treat...
- Patent number 11,235,350
- Issue date Feb 1, 2022
- Tokyo Electron Limited
- Satoshi Shimmura
- B08 - CLEANING
Information Patent Grant
Liquid treatment apparatus
- Patent number 9,620,394
- Issue date Apr 11, 2017
- Tokyo Electron Limited
- Naofumi Kishita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210039131
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Satoshi Shimmura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD FOR SOLUTION TREAT...
- Publication number 20190255561
- Publication date Aug 22, 2019
- TOKYO ELECTRON LIMITED
- Satoshi SHIMMURA
- B08 - CLEANING
Information Patent Application
LIQUID TREATMENT APPARATUS
- Publication number 20140261163
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Naofumi KISHITA
- H01 - BASIC ELECTRIC ELEMENTS