Yuji SHIBA

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Ageo-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mark, method for forming same, and exposure apparatus
- Patent number 10,461,039
- Issue date Oct 29, 2019
- Nikon Corporation
- Yuji Shiba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mark forming method, mark detecting method, and device manufacturin...
- Patent number 10,354,959
- Issue date Jul 16, 2019
- Nikon Corporation
- Yuji Shiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark, method for forming same, and exposure apparatus
- Patent number 10,236,259
- Issue date Mar 19, 2019
- Nikon Corporation
- Yuji Shiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark forming method, mark detecting method, and device manufacturin...
- Patent number 9,972,574
- Issue date May 15, 2018
- Nikon Corporation
- Yuji Shiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark, method for forming same, and exposure apparatus
- Patent number 9,941,217
- Issue date Apr 10, 2018
- Nikon Corporation
- Yuji Shiba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mark forming method, mark detecting method, and device manufacturin...
- Patent number 9,935,054
- Issue date Apr 3, 2018
- Nikon Corporation
- Yuji Shiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS
- Publication number 20190164900
- Publication date May 30, 2019
- Nikon Corporation
- Yuji SHIBA
- B82 - NANO-TECHNOLOGY
Information Patent Application
MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS
- Publication number 20180197820
- Publication date Jul 12, 2018
- Nikon Corporation
- Yuji SHIBA
- B82 - NANO-TECHNOLOGY
Information Patent Application
MARK FORMING METHOD, MARK DETECTING METHOD, AND DEVICE MANUFACTURIN...
- Publication number 20180182713
- Publication date Jun 28, 2018
- Nikon Corporation
- Yuji SHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MARK FORMING METHOD, MARK DETECTING METHOD, AND DEVICE MANUFACTURIN...
- Publication number 20160079179
- Publication date Mar 17, 2016
- Nikon Corporation
- Yuji SHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MARK, METHOD FOR FORMING SAME, AND EXPOSURE APPARATUS
- Publication number 20150200165
- Publication date Jul 16, 2015
- Nikon Corporation
- Yuji SHIBA
- H01 - BASIC ELECTRIC ELEMENTS