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Yuji Shinano
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Exposure apparatus and method of manufacturing device
Patent number
8,102,503
Issue date
Jan 24, 2012
Canon Kabushiki Kaisha
Toshiyuki Yoshihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical apparatus, method of determining position of optical elemen...
Patent number
7,301,615
Issue date
Nov 27, 2007
Canon Kabushiki Kaisha
Youzou Fukagawa
G02 - OPTICS
Information
Patent Grant
Optical apparatus, method of determining position of optical elemen...
Patent number
7,230,692
Issue date
Jun 12, 2007
Canon Kabushiki Kaisha
Youzou Fukagawa
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
Publication number
20090103065
Publication date
Apr 23, 2009
Canon Kabushiki Kaisha
Toshiyuki Yoshihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL APPARATUS, METHOD OF DETERMINING POSITION OF OPTICAL ELEMEN...
Publication number
20070115458
Publication date
May 24, 2007
Canon Kabushiki Kaisha
Youzou Fukagawa
G02 - OPTICS
Information
Patent Application
Optical apparatus, method of determining position of optical elemen...
Publication number
20050206880
Publication date
Sep 22, 2005
Canon Kabushiki Kaisha
Youzou Fukugawa
G02 - OPTICS