Yuji Sugahara

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,805,938
- Issue date Oct 31, 2017
- SCREEN Holdings Co., Ltd.
- Naozumi Fujiwara
- B08 - CLEANING
Information Patent Grant
Resist stripping method and resist stripping apparatus
- Patent number 7,682,463
- Issue date Mar 23, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Atsushi Okuyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160086810
- Publication date Mar 24, 2016
- SCREEN Holdings Co., Ltd.
- Naozumi FUJIWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150114432
- Publication date Apr 30, 2015
- SCREEN Holdings Co., Ltd.
- Keiji IWATA
- B08 - CLEANING
Information Patent Application
Resist stripping method and resist stripping apparatus
- Publication number 20050205115
- Publication date Sep 22, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Atsushi Okuyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY