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Yuji Takabatake
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Iwate, JP
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last 30 patents
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Patent Grant
Ready for rotation state detection device, method of detecting read...
Patent number
10,002,417
Issue date
Jun 19, 2018
Tokyo Electron Limited
Kiichi Takahashi
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS USING ROTATABLE TABLE
Publication number
20150240357
Publication date
Aug 27, 2015
TOKYO ELECTRON LIMITED
Mitsuhiro TACHIBANA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE EJECTION DETECTION DEVICE, METHOD OF DETECTING SUBSTRATE...
Publication number
20140345523
Publication date
Nov 27, 2014
TOKYO ELECTRON LIMITED
Hitoshi KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
READY FOR ROTATION STATE DETECTION DEVICE, METHOD OF DETECTING READ...
Publication number
20140347465
Publication date
Nov 27, 2014
TOKYO ELECTRON LIMITED
Kiichi TAKAHASHI
G06 - COMPUTING CALCULATING COUNTING