Yuji Takagi

Person

Yokahama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device
- Patent number 12,142,457
- Issue date Nov 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect detection device, defect detection method, and defect observ...
- Patent number 11,802,841
- Issue date Oct 31, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation device and sample observation method
- Patent number 11,170,483
- Issue date Nov 9, 2021
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation device and defect observation method
- Patent number 11,087,454
- Issue date Aug 10, 2021
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement device, method and display device
- Patent number 10,996,569
- Issue date May 4, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer observation device
- Patent number 10,977,786
- Issue date Apr 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation system and defect observation method for semicon...
- Patent number 10,971,325
- Issue date Apr 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Defect classification apparatus and defect classification method
- Patent number 10,810,733
- Issue date Oct 20, 2020
- HITACHI HIGH-TECH CORPORATION
- Naoaki Kondo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring overlay and measuring apparatus, scanning elec...
- Patent number 10,783,625
- Issue date Sep 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation device
- Patent number 10,770,260
- Issue date Sep 8, 2020
- Hitachi High-Technologies Corporation
- Yuko Otani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscope device and inclined hole measurement method usi...
- Patent number 10,720,307
- Issue date Jul 21, 2020
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G01 - MEASURING TESTING
Information Patent Grant
Sample observation device and sample observation method
- Patent number 10,559,074
- Issue date Feb 11, 2020
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect reviewing method and device
- Patent number 10,436,576
- Issue date Oct 8, 2019
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Grant
Defect quantification method, defect quantification device, and def...
- Patent number 10,297,021
- Issue date May 21, 2019
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation method and sample observation device
- Patent number 10,229,812
- Issue date Mar 12, 2019
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect classification apparatus and defect classification method
- Patent number 10,203,851
- Issue date Feb 12, 2019
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay measurement method, device, and display device
- Patent number 10,094,658
- Issue date Oct 9, 2018
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 9,922,414
- Issue date Mar 20, 2018
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect observation method and defect observation device
- Patent number 9,811,897
- Issue date Nov 7, 2017
- Hitachi High-Technologies Corporation
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring overlay and measuring apparatus, scanning elec...
- Patent number 9,799,112
- Issue date Oct 24, 2017
- Hitachi High-Technologies Corporation
- Minoru Harada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern measuring apparatus, pattern measuring method, and computer...
- Patent number 9,521,372
- Issue date Dec 13, 2016
- Hitachi High-Technologies Corporation
- Yoshinori Momonoi
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Defect classification method, and defect classification system
- Patent number 9,401,015
- Issue date Jul 26, 2016
- Hitachi High-Technologies Corporation
- Yohei Minekawa
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for testing defect using SEM
- Patent number 9,390,490
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern dimension measurement method, pattern dimension measurement...
- Patent number 9,191,628
- Issue date Nov 17, 2015
- Hitachi High-Technologies Corporation
- Shinya Yamada
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Semiconductor device defect inspection method and system thereof
- Patent number 9,153,020
- Issue date Oct 6, 2015
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Reviewed defect selection processing method, defect review method,...
- Patent number 8,675,949
- Issue date Mar 18, 2014
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G01 - MEASURING TESTING
Information Patent Grant
Method of evaluating systematic defect, and apparatus therefor
- Patent number 8,621,400
- Issue date Dec 31, 2013
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor defect classifying method, semiconductor defect class...
- Patent number 8,595,666
- Issue date Nov 26, 2013
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting method, inspecting system, and method for manufacturing...
- Patent number 8,428,336
- Issue date Apr 23, 2013
- Hitachi, Ltd.
- Yoko Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for detecting pattern defects
- Patent number 8,306,312
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Hisae Shibuya
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
AMBULANCE SERVICE SUPPORT DEVICE, AMBULANCE SERVICE SUPPORT METHOD,...
- Publication number 20240087730
- Publication date Mar 14, 2024
- NEC Corporation
- Hiroki Naoshima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AMBULANCE SERVICE SUPPORT DEVICE, AMBULANCE SERVICE SUPPORT METHOD,...
- Publication number 20240087732
- Publication date Mar 14, 2024
- NEC Corporation
- Hiroki Naoshima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD, APPARATUS, AND PROGRAM FOR DETERMINING CONDITION RELATED TO...
- Publication number 20230032587
- Publication date Feb 2, 2023
- HITACHI HIGH-TECH CORPORATION
- Takahiro NISHIHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE OBSERVATION DEVICE AND METHOD
- Publication number 20220405905
- Publication date Dec 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Yuki Doi
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220367147
- Publication date Nov 17, 2022
- Hitachi High-Tech Corporation
- Takahiro NISHIHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, CONTROL METHOD, AND RECORDING MEDIUM
- Publication number 20220277640
- Publication date Sep 1, 2022
- NEC Corporation
- Eiji Takada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INFORMATION PROVIDING DEVICE, INFORMATION PROVIDING METHOD, AND STO...
- Publication number 20220229295
- Publication date Jul 21, 2022
- NEC Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AMBULANCE SERVICE SUPPORT DEVICE, AMBULANCE SERVICE SUPPORT METHOD,...
- Publication number 20220223267
- Publication date Jul 14, 2022
- NEC Corporation
- Hiroki Naoshima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT DETECTION DEVICE, DEFECT DETECTION METHOD, AND DEFECT OBSERV...
- Publication number 20210109035
- Publication date Apr 15, 2021
- Hitachi High-Tech Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD
- Publication number 20200126201
- Publication date Apr 23, 2020
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...
- Publication number 20200083017
- Publication date Mar 12, 2020
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD
- Publication number 20200034957
- Publication date Jan 30, 2020
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON MICROSCOPE DEVICE AND INCLINED HOLE MEASUREMENT METHOD USI...
- Publication number 20190362933
- Publication date Nov 28, 2019
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER OBSERVATION DEVICE
- Publication number 20190266713
- Publication date Aug 29, 2019
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION DEVICE
- Publication number 20190237296
- Publication date Aug 1, 2019
- Hitachi High-Technologies Corporation
- Yuko OTANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT CLASSIFICATION APPARATUS AND DEFECT CLASSIFICATION METHOD
- Publication number 20190139210
- Publication date May 9, 2019
- Hitachi High-Technologies Corporation
- Naoaki KONDO
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT DEVICE, METHOD AND DISPLAY DEVICE
- Publication number 20190033728
- Publication date Jan 31, 2019
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD
- Publication number 20180240225
- Publication date Aug 23, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT IMAGE CLASSIFICATION DEVICE AND DEFECT IMAGE CLASSIFICATION...
- Publication number 20180174000
- Publication date Jun 21, 2018
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...
- Publication number 20180025482
- Publication date Jan 25, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SAMPLE OBSERVATION METHOD AND SAMPLE OBSERVATION DEVICE
- Publication number 20180019097
- Publication date Jan 18, 2018
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G01 - MEASURING TESTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE
- Publication number 20170328842
- Publication date Nov 16, 2017
- Hitachi High-Technologies Corporation
- Yuko Otani
- G01 - MEASURING TESTING
Information Patent Application
DEFECT QUANTIFICATION METHOD, DEFECT QUANTIFICATION DEVICE, AND DEF...
- Publication number 20170323435
- Publication date Nov 9, 2017
- Hitachi High-Technologies Corporation
- Yohei MINEKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OVERLAY MEASUREMENT METHOD, DEVICE, AND DISPLAY DEVICE
- Publication number 20170322021
- Publication date Nov 9, 2017
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G01 - MEASURING TESTING
Information Patent Application
DEFECT REVIEWING METHOD AND DEVICE
- Publication number 20170082425
- Publication date Mar 23, 2017
- Hitachi High-Technologies Corporation
- Yohei MINEKAWA
- G02 - OPTICS
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE
- Publication number 20160019682
- Publication date Jan 21, 2016
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE
- Publication number 20150332445
- Publication date Nov 19, 2015
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...
- Publication number 20140375793
- Publication date Dec 25, 2014
- Minoru Harada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GUI, CLASSIFICATION APPARATUS, CLASSIFICATION METHOD, PROGRAM, AND...
- Publication number 20140331173
- Publication date Nov 6, 2014
- Yohei Minekawa
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR DEVICE DEFECT INSPECTION METHOD AND SYSTEM THEREOF
- Publication number 20140198974
- Publication date Jul 17, 2014
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING

Yuji Takagi

Person

Patents Grantslast 30 patents

Charged particle beam device

Defect detection device, defect detection method, and defect observ...

Sample observation device and sample observation method

Defect observation device and defect observation method

Measurement device, method and display device

Wafer observation device

Defect observation system and defect observation method for semicon...

Defect classification apparatus and defect classification method

Method for measuring overlay and measuring apparatus, scanning elec...

Defect observation device

Electron microscope device and inclined hole measurement method usi...

Sample observation device and sample observation method

Defect reviewing method and device

Defect quantification method, defect quantification device, and def...

Sample observation method and sample observation device

Defect classification apparatus and defect classification method

Overlay measurement method, device, and display device

Defect inspection method and defect inspection device

Defect observation method and defect observation device

Method for measuring overlay and measuring apparatus, scanning elec...

Pattern measuring apparatus, pattern measuring method, and computer...

Defect classification method, and defect classification system

Method and device for testing defect using SEM

Pattern dimension measurement method, pattern dimension measurement...

Semiconductor device defect inspection method and system thereof

Reviewed defect selection processing method, defect review method,...

Method of evaluating systematic defect, and apparatus therefor

Semiconductor defect classifying method, semiconductor defect class...

Inspecting method, inspecting system, and method for manufacturing...

Method and apparatus for detecting pattern defects

Patents Applicationslast 30 patents

AMBULANCE SERVICE SUPPORT DEVICE, AMBULANCE SERVICE SUPPORT METHOD,...

AMBULANCE SERVICE SUPPORT DEVICE, AMBULANCE SERVICE SUPPORT METHOD,...

METHOD, APPARATUS, AND PROGRAM FOR DETERMINING CONDITION RELATED TO...

SAMPLE OBSERVATION DEVICE AND METHOD

CHARGED PARTICLE BEAM DEVICE

CONTROL DEVICE, CONTROL METHOD, AND RECORDING MEDIUM

INFORMATION PROVIDING DEVICE, INFORMATION PROVIDING METHOD, AND STO...

AMBULANCE SERVICE SUPPORT DEVICE, AMBULANCE SERVICE SUPPORT METHOD,...

DEFECT DETECTION DEVICE, DEFECT DETECTION METHOD, AND DEFECT OBSERV...

SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...

DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD

ELECTRON MICROSCOPE DEVICE AND INCLINED HOLE MEASUREMENT METHOD USI...

WAFER OBSERVATION DEVICE

DEFECT OBSERVATION DEVICE

DEFECT CLASSIFICATION APPARATUS AND DEFECT CLASSIFICATION METHOD

MEASUREMENT DEVICE, METHOD AND DISPLAY DEVICE

SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

DEFECT IMAGE CLASSIFICATION DEVICE AND DEFECT IMAGE CLASSIFICATION...

METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...

SAMPLE OBSERVATION METHOD AND SAMPLE OBSERVATION DEVICE

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE

DEFECT QUANTIFICATION METHOD, DEFECT QUANTIFICATION DEVICE, AND DEF...

OVERLAY MEASUREMENT METHOD, DEVICE, AND DISPLAY DEVICE

DEFECT REVIEWING METHOD AND DEVICE

DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE

DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE

METHOD FOR MEASURING OVERLAY AND MEASURING APPARATUS, SCANNING ELEC...

GUI, CLASSIFICATION APPARATUS, CLASSIFICATION METHOD, PROGRAM, AND...

SEMICONDUCTOR DEVICE DEFECT INSPECTION METHOD AND SYSTEM THEREOF