Yuji Takebayashi

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 11,996,311
- Issue date May 28, 2024
- Kokusai Electric Corporation
- Hiroshi Ashihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,869,790
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Yuji Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 11,299,804
- Issue date Apr 12, 2022
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate holder and mounting tool
- Patent number 11,031,270
- Issue date Jun 8, 2021
- Kokusai Electric Corporation
- Atsushi Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and precursor gas nozzle
- Patent number 11,020,760
- Issue date Jun 1, 2021
- Kokusai Electric Corporation
- Toshiki Fujino
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,640,869
- Issue date May 5, 2020
- Kokusai Electric Corporation
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply nozzle
- Patent number D828091
- Issue date Sep 11, 2018
- Hitachi Kokusai Electric, Inc.
- Toshiki Fujino
- D07 - Equipment for preparing or serving food or drink not elsewhere specified
Information Patent Grant
Method for processing substrate and substrate processing apparatus
- Patent number 9,768,012
- Issue date Sep 19, 2017
- Hitachi Kokusai Electric Inc.
- Hirohisa Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,708,708
- Issue date Jul 18, 2017
- Hitachi Kokusai Electric, Inc.
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,646,821
- Issue date May 9, 2017
- Hitachi Kokusai Electric, Inc.
- Tetsuo Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,496,134
- Issue date Nov 15, 2016
- Hitachi Kokusai Electric Inc.
- Shinya Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,437,421
- Issue date Sep 6, 2016
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method, substrate processing app...
- Patent number 8,866,271
- Issue date Oct 21, 2014
- Hitachi Kokusai Electric Inc.
- Katsuhiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 8,828,141
- Issue date Sep 9, 2014
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,741,731
- Issue date Jun 3, 2014
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device and processing appar...
- Patent number 8,481,434
- Issue date Jul 9, 2013
- Hitachi Kokusai Electric Inc.
- Hironobu Miya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 8,461,062
- Issue date Jun 11, 2013
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,420,552
- Issue date Apr 16, 2013
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,343,277
- Issue date Jan 1, 2013
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boat of wafer processing apparatus
- Patent number D655682
- Issue date Mar 13, 2012
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Boat of wafer processing apparatus
- Patent number D655255
- Issue date Mar 6, 2012
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus
- Patent number 8,012,259
- Issue date Sep 6, 2011
- Hitachi Kokusai Electric, Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube
- Patent number D610559
- Issue date Feb 23, 2010
- Hitachi Kokusai Electric, Inc.
- Satoshi Okada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate carrying apparatus
- Patent number 5,957,651
- Issue date Sep 28, 1999
- Kokusai Electric Co., Ltd.
- Yuji Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240274455
- Publication date Aug 15, 2024
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240186156
- Publication date Jun 6, 2024
- Kokusai Electric Corporation
- Kenji ONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240145287
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Yuji Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, METHOD OF PROCES...
- Publication number 20240003012
- Publication date Jan 4, 2024
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230307279
- Publication date Sep 28, 2023
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20230298918
- Publication date Sep 21, 2023
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20230230861
- Publication date Jul 20, 2023
- Kokusai Electric Corporation
- Takefumi MORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230100702
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Tatsuki JINDEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20230091850
- Publication date Mar 23, 2023
- Kokusai Electric Corporation
- Hiroki HATTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220208530
- Publication date Jun 30, 2022
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ELEVATOR AND METHOD OF MANUFACTURIN...
- Publication number 20220199443
- Publication date Jun 23, 2022
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220170160
- Publication date Jun 2, 2022
- Kokusai Electric Corporation
- Makoto HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220145465
- Publication date May 12, 2022
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220042170
- Publication date Feb 10, 2022
- Kokusai Electric Corporation
- Kosuke TAKAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220002873
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Kazuki NONOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...
- Publication number 20210193486
- Publication date Jun 24, 2021
- Kokusai Electric Corporation
- Gen LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Gas Nozzle and Method of Manufactur...
- Publication number 20200392625
- Publication date Dec 17, 2020
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Non-transitory Comput...
- Publication number 20200095676
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190093224
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Ryosuke YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190093222
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER AND MOUNTING TOOL
- Publication number 20180374734
- Publication date Dec 27, 2018
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PRECURSOR GAS NOZZLE
- Publication number 20170232457
- Publication date Aug 17, 2017
- Hitachi Kokusai Electric Inc.
- Toshiki FUJINO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20170067159
- Publication date Mar 9, 2017
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20160079070
- Publication date Mar 17, 2016
- Hitachi Kokusai Electric Inc.
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150243493
- Publication date Aug 27, 2015
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20150162184
- Publication date Jun 11, 2015
- Hitachi Kokusai Electric Inc.
- Tetsuo Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20140213069
- Publication date Jul 31, 2014
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20140182515
- Publication date Jul 3, 2014
- Hitachi Kokusai Electric Inc.
- Hirohisa YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20130267100
- Publication date Oct 10, 2013
- Hitachi Kokusai Electric Inc.
- Kosuke TAKAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Exhaust Unit, Substrate Processing Apparatus, and Method of Manufac...
- Publication number 20130137279
- Publication date May 30, 2013
- Hitachi Kokusai Electric Inc.
- Tetsuo Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS

Yuji Takebayashi

Person

Patents Grantslast 30 patents

Substrate processing apparatus, method of processing substrate, met...

Substrate processing apparatus, method of manufacturing semiconduct...

Method of manufacturing semiconductor device, non-transitory comput...

Substrate processing apparatus, substrate holder and mounting tool

Substrate processing apparatus and precursor gas nozzle

Method of manufacturing semiconductor device, substrate processing...

Gas supply nozzle

Method for processing substrate and substrate processing apparatus

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Semiconductor device manufacturing method, substrate processing app...

Substrate processing apparatus and method for manufacturing semicon...

Method of manufacturing a semiconductor device

Method of manufacturing a semiconductor device and processing appar...

Substrate processing apparatus and method for manufacturing semicon...

Method of manufacturing a semiconductor device

Substrate processing apparatus

Boat of wafer processing apparatus

Boat of wafer processing apparatus

Substrate processing apparatus

Reaction tube

Substrate carrying apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, METHOD OF PROCES...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, ELEVATOR AND METHOD OF MANUFACTURIN...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...

Substrate Processing Apparatus, Gas Nozzle and Method of Manufactur...

Method of Manufacturing Semiconductor Device, Non-transitory Comput...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER AND MOUNTING TOOL

SUBSTRATE PROCESSING APPARATUS AND PRECURSOR GAS NOZZLE

Method of Manufacturing Semiconductor Device

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

Method of Manufacturing Semiconductor Device

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Exhaust Unit, Substrate Processing Apparatus, and Method of Manufac...