Yuji Tanaka

Person

Settu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film processing method
- Patent number 12,119,242
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, film formation unit, substrate proc...
- Patent number 11,986,853
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exposure device
- Patent number 11,281,108
- Issue date Mar 22, 2022
- SCREEN Holdings Co., Ltd.
- You Arisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,243,469
- Issue date Feb 8, 2022
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and apparatus used therefor
- Patent number 11,143,964
- Issue date Oct 12, 2021
- SCREEN Holdings Co., Ltd.
- Yasuhiro Fukumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating method
- Patent number 11,107,698
- Issue date Aug 31, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film processing unit and substrate processing apparatus
- Patent number 11,004,702
- Issue date May 11, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method an...
- Patent number 10,955,745
- Issue date Mar 23, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating method
- Patent number 10,941,492
- Issue date Mar 9, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method
- Patent number 10,915,025
- Issue date Feb 9, 2021
- SCREEN Holdings Co., Ltd.
- Yasuhiro Fukumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and apparatus used therefor
- Patent number 10,900,126
- Issue date Jan 26, 2021
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film processing unit, substrate processing apparatus and substrate...
- Patent number 10,854,480
- Issue date Dec 1, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for processing substrate
- Patent number 10,840,096
- Issue date Nov 17, 2020
- SCREEN Holdings Co., Ltd.
- Takahiro Yamada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal processing device, substrate processing apparatus, thermal...
- Patent number 10,832,925
- Issue date Nov 10, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Development unit, substrate processing apparatus, development metho...
- Patent number 10,754,251
- Issue date Aug 25, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing method
- Patent number 10,684,548
- Issue date Jun 16, 2020
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus
- Patent number 10,651,062
- Issue date May 12, 2020
- SCREEN Holdings Co., Ltd.
- Yasuhiro Fukumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,591,820
- Issue date Mar 17, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating method
- Patent number 10,569,297
- Issue date Feb 25, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing method
- Patent number 10,539,877
- Issue date Jan 21, 2020
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure device substrate processing apparatus, exposure method of...
- Patent number 10,444,636
- Issue date Oct 15, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Motor stop control method and motor stop control apparatus
- Patent number 10,439,520
- Issue date Oct 8, 2019
- Nidec Corporation
- Osamu Okazaki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Motor operation control system, multi-axis mechanical apparatus, an...
- Patent number 10,406,682
- Issue date Sep 10, 2019
- Nidec Corporation
- Osamu Okazaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Exposure device, substrate processing apparatus, exposure method of...
- Patent number 10,401,736
- Issue date Sep 3, 2019
- SCREEN Holdings Co., Ltd.
- Tomohiro Matsuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching device, substrate processing apparatus, etching method and...
- Patent number 10,395,942
- Issue date Aug 27, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko Harumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,331,034
- Issue date Jun 25, 2019
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method
- Patent number 10,185,219
- Issue date Jan 22, 2019
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Motor with a stator having four separate corner bobbins/insulators...
- Patent number 9,634,533
- Issue date Apr 25, 2017
- Nidec Corporation
- Yoshihiro Uchitani
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stator core having convex protruding portion coinciding with adjace...
- Patent number 9,531,222
- Issue date Dec 27, 2016
- Nidec Corporation
- Yoshihiro Uchitani
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Silicon-containing organic fluoropolymers and use of the same
- Patent number 6,183,872
- Issue date Feb 6, 2001
- Daikin Industries, Ltd.
- Yuji Tanaka
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM PROCESSING METHOD
- Publication number 20210233784
- Publication date Jul 29, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20210134605
- Publication date May 6, 2021
- SCREEN Holdings Co., Ltd.
- Chisayo NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE
- Publication number 20210088911
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- You Arisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20210078036
- Publication date Mar 18, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20200272055
- Publication date Aug 27, 2020
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD
- Publication number 20190294049
- Publication date Sep 26, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PROCESSING SUBSTRATE
- Publication number 20190228964
- Publication date Jul 25, 2019
- SCREEN Holdings Co., Ltd.
- Takahiro YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190196335
- Publication date Jun 27, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING METHOD
- Publication number 20190107780
- Publication date Apr 11, 2019
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...
- Publication number 20190086808
- Publication date Mar 21, 2019
- SCREEN Holdings Co., Ltd.
- Chisayo NAKAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190041754
- Publication date Feb 7, 2019
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPMENT UNIT, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHO...
- Publication number 20190041755
- Publication date Feb 7, 2019
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190004427
- Publication date Jan 3, 2019
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE...
- Publication number 20180315623
- Publication date Nov 1, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180315625
- Publication date Nov 1, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20180269084
- Publication date Sep 20, 2018
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253012
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...
- Publication number 20180253011
- Publication date Sep 6, 2018
- SCREEN Holdings Co., Ltd.
- Tomohiro MATSUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20180230598
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20180230599
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20180231895
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR
- Publication number 20180231894
- Publication date Aug 16, 2018
- SCREEN Holdings Co., Ltd.
- Yasuhiro FUKUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOTOR STOP CONTROL METHOD AND MOTOR STOP CONTROL APPARATUS
- Publication number 20180212539
- Publication date Jul 26, 2018
- NIDEC CORPORATION
- Osamu OKAZAKI
- G05 - CONTROLLING REGULATING
Information Patent Application
MOTOR OPERATION CONTROL SYSTEM, MULTI-AXIS MECHANICAL APPARATUS, AN...
- Publication number 20180200883
- Publication date Jul 19, 2018
- NIDEC CORPORATION
- Osamu OKAZAKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20180147599
- Publication date May 31, 2018
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING DEVICE, SUBSTRATE PROCESSING APPARATUS, ETCHING METHOD AND...
- Publication number 20180076056
- Publication date Mar 15, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, THERMAL...
- Publication number 20180050368
- Publication date Feb 22, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COATING METHOD
- Publication number 20180036767
- Publication date Feb 8, 2018
- SCREEN Holdings Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DEVELOPING METHOD
- Publication number 20160195811
- Publication date Jul 7, 2016
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yuji Tanaka

Person

Patents Grantslast 30 patents

Film processing method

Substrate processing apparatus, film formation unit, substrate proc...

Exposure device

Substrate processing apparatus and substrate processing method

Substrate treating method and apparatus used therefor

Substrate treating method

Film processing unit and substrate processing apparatus

Exposure device, substrate processing apparatus, exposure method an...

Substrate treating method

Substrate treating method

Substrate treating method and apparatus used therefor

Film processing unit, substrate processing apparatus and substrate...

Method for processing substrate

Thermal processing device, substrate processing apparatus, thermal...

Development unit, substrate processing apparatus, development metho...

Developing method

Substrate treating apparatus

Substrate processing apparatus and substrate processing method

Coating method

Developing method

Exposure device substrate processing apparatus, exposure method of...

Motor stop control method and motor stop control apparatus

Motor operation control system, multi-axis mechanical apparatus, an...

Exposure device, substrate processing apparatus, exposure method of...

Etching device, substrate processing apparatus, etching method and...

Substrate processing apparatus and substrate processing method

Developing method

Motor with a stator having four separate corner bobbins/insulators...

Stator core having convex protruding portion coinciding with adjace...

Silicon-containing organic fluoropolymers and use of the same

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

FILM PROCESSING METHOD

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

EXPOSURE DEVICE

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

DEVELOPING METHOD

METHOD FOR PROCESSING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPING METHOD

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD AN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DEVELOPMENT UNIT, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM PROCESSING UNIT, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE...

FILM PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, EXPOSURE METHOD OF...

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

SUBSTRATE TREATING METHOD

SUBSTRATE TREATING METHOD

SUBSTRATE TREATING METHOD AND APPARATUS USED THEREFOR

MOTOR STOP CONTROL METHOD AND MOTOR STOP CONTROL APPARATUS

MOTOR OPERATION CONTROL SYSTEM, MULTI-AXIS MECHANICAL APPARATUS, AN...

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

ETCHING DEVICE, SUBSTRATE PROCESSING APPARATUS, ETCHING METHOD AND...

THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS, THERMAL...

COATING METHOD

DEVELOPING METHOD