Yuji Terashima

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Nagano-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of polishing copper layer of substrate
- Patent number 6,797,626
- Issue date Sep 28, 2004
- Fujikoshi Machinery Corp.
- Noriko Miyairi
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Method of polishing copper layer of substrate
- Publication number 20030124862
- Publication date Jul 3, 2003
- Fujikoshi Machinery Corp.
- Noriko Miyairi
- B24 - GRINDING POLISHING