Yuji YAGI

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing head system and polishing apparatus
- Patent number 12,017,323
- Issue date Jun 25, 2024
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing system, substrate polishing method and substrat...
- Patent number 11,633,828
- Issue date Apr 25, 2023
- Ebara Corporation
- Yuta Suzuki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing machine and a polishing method for a substrate
- Patent number 11,465,254
- Issue date Oct 11, 2022
- Ebara Corporation
- Itsuki Kobata
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING HEAD SYSTEM AND POLISHING APPARATUS
- Publication number 20210237224
- Publication date Aug 5, 2021
- EBARA CORPORATION
- Itsuki Kobata
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING SYSTEM, SUBSTRATE POLISHING METHOD AND SUBSTRAT...
- Publication number 20200269380
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Yuta Suzuki
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING MACHINE AND A POLISHING METHOD FOR A SUBSTRATE
- Publication number 20200171618
- Publication date Jun 4, 2020
- EBARA CORPORATION
- Itsuki KOBATA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING MACHINE AND A POLISHING METHOD FOR A SUBSTRATE
- Publication number 20170259395
- Publication date Sep 14, 2017
- EBARA CORPORATION
- Itsuki KOBATA
- B24 - GRINDING POLISHING