Yuji Yamaguchi

Person

  • Kyoto-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate treating method and substrate treating device

    • Patent number 10,651,060
    • Issue date May 12, 2020
    • SCREEN Holdings Co., Ltd.
    • Yuji Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gas supply system

    • Patent number 9,285,079
    • Issue date Mar 15, 2016
    • Horiba Stec, Co., Ltd.
    • Yuji Yamaguchi
    • F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
  • Information Patent Grant

    Fluid device

    • Patent number 9,091,380
    • Issue date Jul 28, 2015
    • Horiba Stec, Co., Ltd.
    • Tatsuya Hayashi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Coupling ring

    • Patent number 8,979,137
    • Issue date Mar 17, 2015
    • Ihara Science Corporation
    • Miyoshi Kimura
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Diagnostic mechanism

    • Patent number 8,965,714
    • Issue date Feb 24, 2015
    • Horiba Stec, Co., Ltd.
    • Yuji Yamaguchi
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Mass flow controller verifying system, verifying method and verifyi...

    • Patent number 8,646,307
    • Issue date Feb 11, 2014
    • Horiba Stec, Co., Ltd.
    • Tadahiro Yasuda
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Mass flow controller verifying system, verifying method and verifyi...

    • Patent number 8,443,649
    • Issue date May 21, 2013
    • Horiba Stec, Co., Ltd.
    • Tadahiro Yasuda
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Flow rate ratio control device

    • Patent number 8,019,481
    • Issue date Sep 13, 2011
    • Horiba Stec, Co., Ltd.
    • Yuji Yamaguchi
    • G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

    • Publication number 20230184487
    • Publication date Jun 15, 2023
    • SCREEN Holdings Co., Ltd.
    • Yuji YAMAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

    • Publication number 20230074202
    • Publication date Mar 9, 2023
    • SCREEN Holdings Co., Ltd.
    • Yuji YAMAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING DEVICE

    • Publication number 20180090341
    • Publication date Mar 29, 2018
    • SCREEN Holdings Co., Ltd.
    • Yuji YAMAGUCHI
    • B08 - CLEANING
  • Information Patent Application

    SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING DEVICE

    • Publication number 20180090343
    • Publication date Mar 29, 2018
    • SCREEN Holdings Co., Ltd.
    • Yuji YAMAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GAS SUPPLY SYSTEM

    • Publication number 20160181071
    • Publication date Jun 23, 2016
    • HORIBA STEC, CO., LTD.
    • Yuji Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FLUID DEVICE

    • Publication number 20150300545
    • Publication date Oct 22, 2015
    • HORIBA STEC, CO., LTD.
    • Tatsuya Hayashi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    MASS FLOW CONTROLLER VERIFYING SYSTEM, VERIFYING METHOD AND VERIFYI...

    • Publication number 20130174635
    • Publication date Jul 11, 2013
    • HORIBA STEC, CO., LTD.
    • Tadahiro Yasuda
    • G01 - MEASURING TESTING
  • Information Patent Application

    GAS SUPPLY SYSTEM

    • Publication number 20130025715
    • Publication date Jan 31, 2013
    • HORIBA STEC, CO., LTD.
    • Yuji Yamaguchi
    • F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
  • Information Patent Application

    DIAGNOSTIC MECHANISM

    • Publication number 20120080104
    • Publication date Apr 5, 2012
    • HORIBA STEC, CO., LTD.
    • Yuji Yamaguchi
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    COUPLING RING

    • Publication number 20110127770
    • Publication date Jun 2, 2011
    • IHARA SCIENCE CORPORATION
    • Miyoshi Kimura
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    FLUID DEVICE

    • Publication number 20110126930
    • Publication date Jun 2, 2011
    • HORIBA STEC, CO., LTD.
    • Tatsuya Hayashi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    MASS FLOW CONTROLLER VERIFYING SYSTEM, VERIFYING METHOD AND VERIFYI...

    • Publication number 20100229967
    • Publication date Sep 16, 2010
    • HORIBA STEC, CO., LTD.
    • Tadahiro Yasuda
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    FLOW RATE RATIO CONTROL DEVICE

    • Publication number 20100030390
    • Publication date Feb 4, 2010
    • HORIBA STEC, Co., LTD.
    • Yuji Yamaguchi
    • G05 - CONTROLLING REGULATING