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Yuji Yoshimoto
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Kikuchi-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Processing apparatus and information storage apparatus and method
Patent number
7,031,792
Issue date
Apr 18, 2006
Tokyo Electron Limited
Yuji Yoshimoto
G11 - INFORMATION STORAGE
Information
Patent Grant
Substrate processing apparatus and information storage apparatus an...
Patent number
6,990,380
Issue date
Jan 24, 2006
Tokyo Electron Limited
Yuji Yoshimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of substrate processing to form a film on multiple target ob...
Patent number
6,054,181
Issue date
Apr 25, 2000
Tokyo Electron Limited
Mitsuhiro Nanbu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer processing apparatus including localized humidi...
Patent number
5,725,664
Issue date
Mar 10, 1998
Tokyo Electron Limited
Mitsuhiro Nanbu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing substrates having a film formed on a surfa...
Patent number
5,565,034
Issue date
Oct 15, 1996
Tokyo Electron Limited
Mitsuhiro Nanbu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid coating system
Patent number
5,374,312
Issue date
Dec 20, 1994
Tokyo Electron Limited
Keizo Hasebe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Transportation-transfer device for an object of treatment
Patent number
5,297,910
Issue date
Mar 29, 1994
Tokyo Electron Limited
Kazutoshi Yoshioka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Processing apparatus and information storage apparatus and method
Publication number
20020145922
Publication date
Oct 10, 2002
TOKYO ELECTRON LIMITED
Yuji Yoshimoto
G11 - INFORMATION STORAGE
Information
Patent Application
Substrate processing apparatus and information storage apparatus an...
Publication number
20020116076
Publication date
Aug 22, 2002
TOKYO ELECTRON LIMITED
Yuji Yoshimoto
G05 - CONTROLLING REGULATING