Yujiao FAN

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Scanning interference lithographic system
- Patent number 12,189,300
- Issue date Jan 7, 2025
- Tsinghua University; Beijing U-Precision Tech Co., Ltd.
- Leijie Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
- Publication number 20240319619
- Publication date Sep 26, 2024
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM
- Publication number 20240264534
- Publication date Aug 8, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY