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Patents Grants
last 30 patents
Information
Patent Grant
Loading apparatus and physical vapor deposition apparatus
Patent number
11,315,768
Issue date
Apr 26, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xuewei Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and aluminum nitride film forming method for se...
Patent number
10,643,843
Issue date
May 5, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming film and method for forming aluminum nitride film
Patent number
10,640,862
Issue date
May 5, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
BIAS MAGNETIC FIELD CONTROL METHOD, CONTROL DEVICE, AND SEMICONDUCT...
Publication number
20240191340
Publication date
Jun 13, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yujie GENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BIAS MAGNETIC FIELD CONTROL METHOD, MAGNETIC THIN FILM DEPOSITION M...
Publication number
20220228253
Publication date
Jul 21, 2022
Yujie GENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOADING APPARATUS AND PHYSICAL VAPOR DEPOSITION APPARATUS
Publication number
20200144035
Publication date
May 7, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xuewei WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING FILM AND METHOD FOR FORMING ALUMINUM NITRIDE FILM
Publication number
20180230586
Publication date
Aug 16, 2018
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jun WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND ALUMINUM NITRIDE FILM FORMING METHOD FOR SE...
Publication number
20170365466
Publication date
Dec 21, 2017
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jun WANG
C30 - CRYSTAL GROWTH