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Yuju Huang
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San Jose, CA, US
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last 30 patents
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Patent Grant
Etching oxide-nitride stacks using C4F6H2
Patent number
9,748,366
Issue date
Aug 29, 2017
Applied Materials, Inc.
Jong Mun Kim
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ETCHING OXIDE-NITRIDE STACKS USING C4F6H2
Publication number
20150097276
Publication date
Apr 9, 2015
Applied Materials, Inc.
Jong Mun Kim
H01 - BASIC ELECTRIC ELEMENTS