Yujun Deng

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for reducing the bandwidth of a laser and an insp...
- Patent number 10,495,582
- Issue date Dec 3, 2019
- KLA-Tencor Corporation
- Yujun Deng
- G01 - MEASURING TESTING
Information Patent Grant
193nm laser and inspection system
- Patent number 10,439,355
- Issue date Oct 8, 2019
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
183NM laser and inspection system
- Patent number 10,199,149
- Issue date Feb 5, 2019
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G02 - OPTICS
Information Patent Grant
Laser repetition rate multiplier and flat-top beam profile generato...
- Patent number 10,044,164
- Issue date Aug 7, 2018
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broadly tunable optical parametric oscillator
- Patent number 10,014,652
- Issue date Jul 3, 2018
- Newport Corporation
- James D. Kafka
- G02 - OPTICS
Information Patent Grant
193nm laser and inspection system
- Patent number 9,935,421
- Issue date Apr 3, 2018
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G02 - OPTICS
Information Patent Grant
System and method for reducing the bandwidth of a laser and an insp...
- Patent number 9,804,101
- Issue date Oct 31, 2017
- KLA-Tencor Corporation
- Yujun Deng
- G02 - OPTICS
Information Patent Grant
Semiconductor inspection and metrology system using laser pulse mul...
- Patent number 9,768,577
- Issue date Sep 19, 2017
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
183NM laser and inspection system
- Patent number 9,748,729
- Issue date Aug 29, 2017
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G02 - OPTICS
Information Patent Grant
193nm laser and inspection system
- Patent number 9,529,182
- Issue date Dec 27, 2016
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G02 - OPTICS
Information Patent Grant
Laser repetition rate multiplier and flat-top beam profile generato...
- Patent number 9,525,265
- Issue date Dec 20, 2016
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser assembly and inspection system using monolithic bandwidth nar...
- Patent number 9,419,407
- Issue date Aug 16, 2016
- KLA-Tencor Corporation
- Yujun Deng
- G01 - MEASURING TESTING
Information Patent Grant
193nm laser and inspection system
- Patent number 9,318,869
- Issue date Apr 19, 2016
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor inspection and metrology system using laser pulse mul...
- Patent number 9,151,940
- Issue date Oct 6, 2015
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
193NM laser and inspection system
- Patent number 8,929,406
- Issue date Jan 6, 2015
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G01 - MEASURING TESTING
Information Patent Grant
Broadly tunable optical parametric oscillator
- Patent number 8,902,939
- Issue date Dec 2, 2014
- Newport Corporation
- James D. Kafka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
193nm Laser And Inspection System
- Publication number 20180191126
- Publication date Jul 5, 2018
- Yung-Ho Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Method For Reducing The Bandwidth Of A Laser And An Insp...
- Publication number 20170356854
- Publication date Dec 14, 2017
- KLA-Tencor Corporation
- Yujun Deng
- G02 - OPTICS
Information Patent Application
183NM Laser And Inspection System
- Publication number 20170323716
- Publication date Nov 9, 2017
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
193nm Laser And Inspection System
- Publication number 20170063026
- Publication date Mar 2, 2017
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G02 - OPTICS
Information Patent Application
Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generato...
- Publication number 20160359292
- Publication date Dec 8, 2016
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BROADLY TUNABLE OPTICAL PARAMTERIC OSCILLATOR
- Publication number 20160211642
- Publication date Jul 21, 2016
- Newport Corporation
- James D. Kafka
- G01 - MEASURING TESTING
Information Patent Application
183NM Laser And Inspection System
- Publication number 20160099540
- Publication date Apr 7, 2016
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G02 - OPTICS
Information Patent Application
Laser Assembly And Inspection System Using Monolithic Bandwidth Nar...
- Publication number 20160094011
- Publication date Mar 31, 2016
- KLA-Tencor Corporation
- Yujun Deng
- G01 - MEASURING TESTING
Information Patent Application
Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generato...
- Publication number 20150372446
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Inspection And Metrology System Using Laser Pulse Mul...
- Publication number 20150364895
- Publication date Dec 17, 2015
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G02 - OPTICS
Information Patent Application
System And Method For Reducing The Bandwidth Of A Laser And An Insp...
- Publication number 20150268176
- Publication date Sep 24, 2015
- KLA-Tencor Corporation
- Yujun Deng
- G01 - MEASURING TESTING
Information Patent Application
193NM Laser And Inspection System
- Publication number 20150155680
- Publication date Jun 4, 2015
- KLA-Tencor Corporation
- Yung-Ho Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
193nm Laser And Inspection System
- Publication number 20140226140
- Publication date Aug 14, 2014
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G02 - OPTICS
Information Patent Application
193NM Laser And Inspection System
- Publication number 20140204963
- Publication date Jul 24, 2014
- KLA-Tencor Corporation
- Yung-Ho Chuang
- G02 - OPTICS
Information Patent Application
Semiconductor Inspection And Metrology System Using Laser Pulse Mul...
- Publication number 20140153596
- Publication date Jun 5, 2014
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BROADLY TUNABLE OPTICAL PARAMETRIC OSCILLATOR
- Publication number 20110180729
- Publication date Jul 28, 2011
- Newport Corporation
- James D. Kafka
- G02 - OPTICS

Person

Patents Grantslast 30 patents

System and method for reducing the bandwidth of a laser and an insp...

193nm laser and inspection system

183NM laser and inspection system

Laser repetition rate multiplier and flat-top beam profile generato...

Broadly tunable optical parametric oscillator

193nm laser and inspection system

System and method for reducing the bandwidth of a laser and an insp...

Semiconductor inspection and metrology system using laser pulse mul...

183NM laser and inspection system

193nm laser and inspection system

Laser repetition rate multiplier and flat-top beam profile generato...

Laser assembly and inspection system using monolithic bandwidth nar...

193nm laser and inspection system

Semiconductor inspection and metrology system using laser pulse mul...

193NM laser and inspection system

Broadly tunable optical parametric oscillator

Patents Applicationslast 30 patents

193nm Laser And Inspection System

System And Method For Reducing The Bandwidth Of A Laser And An Insp...

183NM Laser And Inspection System

193nm Laser And Inspection System

Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generato...

BROADLY TUNABLE OPTICAL PARAMTERIC OSCILLATOR

183NM Laser And Inspection System

Laser Assembly And Inspection System Using Monolithic Bandwidth Nar...

Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generato...

Semiconductor Inspection And Metrology System Using Laser Pulse Mul...

System And Method For Reducing The Bandwidth Of A Laser And An Insp...

193NM Laser And Inspection System

193nm Laser And Inspection System

193NM Laser And Inspection System

Semiconductor Inspection And Metrology System Using Laser Pulse Mul...

BROADLY TUNABLE OPTICAL PARAMETRIC OSCILLATOR