Yuk-Hong Ting

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for reducing copper contamination due to substr...
- Patent number 9,397,011
- Issue date Jul 19, 2016
- Lam Research Corporation
- Haoquan Fang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...