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Yuk-Tong Lee
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Fongshan, TW
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last 30 patents
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Patent Grant
Dosage accuracy monitoring systems of implanters
Patent number
9,048,069
Issue date
Jun 2, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Juan-Lin Chen
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Dosage accuracy monitoring systems of implanters
Publication number
20080296472
Publication date
Dec 4, 2008
Juan-Lin Chen
H01 - BASIC ELECTRIC ELEMENTS