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Yuka Narukawa
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Kamakura, JP
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last 30 patents
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Patent Grant
CaF2 polycrystalline body, focus ring, plasma processing apparatus,...
Patent number
9,580,331
Issue date
Feb 28, 2017
Nikon Corporation
Seishi Fujiwara
C01 - INORGANIC CHEMISTRY
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last 30 patents
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Patent Application
CaF2 POLYCRYSTALLINE BODY, FOCUS RING, PLASMA PROCESSING APPARATUS,...
Publication number
20140079902
Publication date
Mar 20, 2014
Nikon Corporation
Seishi Fujiwara
C30 - CRYSTAL GROWTH