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Yukako Komaru
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Kanagawa, JP
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last 30 patents
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Patent Grant
Method and apparatus for removing a thin film layer
Patent number
5,686,211
Issue date
Nov 11, 1997
Nikon Corporation
Kiyoshi Motegi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method for removing a thin film layer
Patent number
5,656,229
Issue date
Aug 12, 1997
Nikon Corporation
Akikazu Tanimoto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Grant
Apparatus for removing a thin film layer
Patent number
5,597,590
Issue date
Jan 28, 1997
Nikon Corporation
Akikazu Tanimoto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR