Yuki Chiba

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Albany, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Sidewall protection of low-K material during etching and ashing
- Patent number 8,859,430
- Issue date Oct 14, 2014
- Tokyo Electron Limited
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for manufacturing semiconductor device, and st...
- Patent number 8,524,101
- Issue date Sep 3, 2013
- Tokyo Electron Limited
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 8,357,615
- Issue date Jan 22, 2013
- Tokyo Electron Limited
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of metal-containing cap layers for semiconduct...
- Patent number 8,242,019
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 8,012,880
- Issue date Sep 6, 2011
- Tokyo Electron Limited
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and storage medium
- Patent number 7,799,703
- Issue date Sep 21, 2010
- Tokyo Electron Limited
- Kazuhiro Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SIDEWALL PROTECTION OF LOW-K MATERIAL DURING ETCHING AND ASHING
- Publication number 20130344699
- Publication date Dec 26, 2013
- TOKYO ELECTRON LIMITED
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF METAL-CONTAINING CAP LAYERS FOR SEMICONDUCT...
- Publication number 20100248473
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20090029558
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20090011605
- Publication date Jan 8, 2009
- TOKYO ELECTRON LIMITED
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for manufacturing semiconductor device, and st...
- Publication number 20080314520
- Publication date Dec 25, 2008
- TOKYO ELECTRON LIMITED
- Yuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20080194115
- Publication date Aug 14, 2008
- TOKYO ELECTON LIMITED
- Kazuhiro KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS