TREA

Yuki CHIDA

Follow

Person

  • Oshu City, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Pressure control method
    • Patent number 10,655,216
    • Issue date May 19, 2020
    • Tokyo Electron Limited
    • Yuki Chida
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    OZONE CONCENTRATOR, SUBSTRATE PROCESSING APPARATUS, AND OZONE SUPPL...
    • Publication number 20250099904
    • Publication date Mar 27, 2025
    • TOKYO ELECTRON LIMITED
    • Yuki CHIDA
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • Information Patent Application

    PRESSURE CONTROL METHOD
    • Publication number 20180237905
    • Publication date Aug 23, 2018
    • TOKYO ELECTRON LIMITED
    • Yuki CHIDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...