Yuki Ishii

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 11,600,502
- Issue date Mar 7, 2023
- Tokyo Electron Limited
- Hiroshi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 11,594,430
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20200066553
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Hiroshi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20190080937
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS