Yuki Ito

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and non-tr...
- Patent number 11,826,794
- Issue date Nov 28, 2023
- Tokyo Electron Limited
- Yuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement processing device, substrate processing system, measure...
- Patent number 10,713,772
- Issue date Jul 14, 2020
- Tokyo Electron Limited
- Yoshifumi Amano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate cleaning apparatus
- Patent number 10,643,865
- Issue date May 5, 2020
- Tokyo Electron Limited
- Yoshifumi Amano
- A46 - BRUSHWARE
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 9,895,711
- Issue date Feb 20, 2018
- Tokyo Electron Limited
- Jian Zhang
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,818,626
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,793,142
- Issue date Oct 17, 2017
- Tokyo Electron Limited
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, method for controlling substrate proce...
- Patent number 9,782,807
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 9,536,761
- Issue date Jan 3, 2017
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid arm cleaning unit for substrate processing apparatus
- Patent number 9,190,311
- Issue date Nov 17, 2015
- Tokyo Electron Limited
- Jiro Higashijima
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240238848
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Takafumi KINOSHITA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...
- Publication number 20240033786
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Yuki ITO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...
- Publication number 20220111422
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Yuki ITO
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS
- Publication number 20170278728
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- A46 - BRUSHWARE
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20160221046
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Jian Zhang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MEASUREMENT PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, MEASURE...
- Publication number 20160148366
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20160064256
- Publication date Mar 3, 2016
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, METHOD FOR CONTROLLING SUBSTRATE PROCE...
- Publication number 20150013722
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Yoshifumi Amano
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140116478
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140116480
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Jiro Higashijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Processing Apparatus and Liquid Processing Method
- Publication number 20120180828
- Publication date Jul 19, 2012
- Jiro HIGASHIJIMA
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Substrate cleaning apparatus, substrate cleaning method, and non-tr...

Measurement processing device, substrate processing system, measure...

Substrate cleaning apparatus

Substrate liquid processing apparatus, substrate liquid processing...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing system, method for controlling substrate proce...

Substrate liquid processing apparatus

Liquid arm cleaning unit for substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND NON-TR...

SUBSTRATE CLEANING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

MEASUREMENT PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, MEASURE...

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM, METHOD FOR CONTROLLING SUBSTRATE PROCE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Liquid Processing Apparatus and Liquid Processing Method