Yuki Kera

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Joetsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sulfonium compound, chemically amplified resist composition, and pa...
- Patent number 11,687,000
- Issue date Jun 27, 2023
- Shin-Etsu Chemical Co., Ltd.
- Masahiro Fukushima
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Salt compound, chemically amplified resist composition, and pattern...
- Patent number 11,435,666
- Issue date Sep 6, 2022
- Shin-Etsu Chemical Co., Ltd.
- Emiko Ono
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
SULFONIUM COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PA...
- Publication number 20200319550
- Publication date Oct 8, 2020
- Shin-Etsu Chemical Co., Ltd.
- Masahiro Fukushima
- C07 - ORGANIC CHEMISTRY
Information Patent Application
NOVEL SALT COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND P...
- Publication number 20200159115
- Publication date May 21, 2020
- Shin-Etsu Chemical Co., Ltd.
- Emiko Ono
- C07 - ORGANIC CHEMISTRY
Information Patent Application
ONIUM SALT, RESIST COMPOSITION, AND PATTERN FORMING PROCESS
- Publication number 20200102271
- Publication date Apr 2, 2020
- Shin-Etsu Chemical Co., Ltd.
- Masaki Ohashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY