Yuki Kikuchi

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Albany, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods to reduce gouging for core removal processes using thermal...
- Patent number 10,978,300
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods to reshape spacers for multi-patterning processes using the...
- Patent number 10,950,442
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to transfer patterns to a layer
- Patent number 10,916,428
- Issue date Feb 9, 2021
- Tokyo Electron Limited
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned interconnect patterning for back-end-of-line (BEOL) st...
- Patent number 10,886,176
- Issue date Jan 5, 2021
- Tokyo Electron Limited
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning low-k materials using thermal decomposition ma...
- Patent number 10,861,739
- Issue date Dec 8, 2020
- Tokyo Electron Limited
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS TO REDUCE GOUGING FOR CORE REMOVAL PROCESSES USING THERMAL...
- Publication number 20200020523
- Publication date Jan 16, 2020
- TOKYO ELECTRON LIMITED
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO TRANSFER PATTERNS TO A LAYER
- Publication number 20200020534
- Publication date Jan 16, 2020
- TOKYO ELECTRON LIMITED
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO RESHAPE SPACERS FOR MULTI-PATTERNING PROCESSES USING THE...
- Publication number 20200013619
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Utilizing Thermal Decomposition Material To Relax Queue Time...
- Publication number 20190393084
- Publication date Dec 26, 2019
- TOKYO ELECTRON LIMITED
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Patterning Low-K Materials Using Thermal Decomposition Ma...
- Publication number 20190385903
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBTRACTIVE INTERCONNECT FORMATION USING A FULLY SELF-ALIGNED SCHEME
- Publication number 20190304836
- Publication date Oct 3, 2019
- TOKYO ELECTRON LIMITED
- Yuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS