Yuki KUMAMOTO

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Tsukuba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Precursor supply system and precursors supply method
- Patent number 11,819,838
- Issue date Nov 21, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Toshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PRECURSOR SUPPLY SYSTEM AND PRECURSORS SUPPLY METHOD
- Publication number 20190134586
- Publication date May 9, 2019
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...