Membership
Tour
Register
Log in
Yuki MATSUMURA
Follow
Person
Koshi City, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Local exposure apparatus, local exposure method and storage medium
Patent number
9,146,481
Issue date
Sep 29, 2015
Tokyo Electron Limited
Yoshiharu Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LOCAL EXPOSURE APPARATUS, LOCAL EXPOSURE METHOD AND STORAGE MEDIUM
Publication number
20120002183
Publication date
Jan 5, 2012
TOKYO ELECTRON LIMITED
Yoshiharu OTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY