Yuki Mochizuki

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 8,852,386
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Hachishiro Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and shower head
- Patent number 8,747,609
- Issue date Jun 10, 2014
- Tokyo Electron Limited
- Hachishiro Iizuka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND SHOWER HEAD
- Publication number 20110067815
- Publication date Mar 24, 2011
- TOKYO ELECTRON LIMITED
- Hachishiro Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110061813
- Publication date Mar 17, 2011
- TOKYO ELECTRON LIMITED
- Hachishiro Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100307686
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Hachishiro Iizuka
- H01 - BASIC ELECTRIC ELEMENTS