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Yuki MURASAKA
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Yokkaichi Mie, JP
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Patents Grants
last 30 patents
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Patent Grant
Pattern accuracy detecting apparatus and processing system
Patent number
9,941,177
Issue date
Apr 10, 2018
TOSHIBA MEMORY CORPORATION
Kentaro Kasa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PATTERN ACCURACY DETECTING APPARATUS AND PROCESSING SYSTEM
Publication number
20170271214
Publication date
Sep 21, 2017
Kabushiki Kaisha Toshiba
Kentaro KASA
G01 - MEASURING TESTING