Yuki NAKANO

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing head, wafer polishing apparatus using the same, and wafer...
- Patent number 11,554,458
- Issue date Jan 17, 2023
- Sumco Corporation
- Yuki Nakano
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CREATING CORRELATION RELATIONAL FORMULA FOR DETERMINING P...
- Publication number 20240246191
- Publication date Jul 25, 2024
- SUMCO CORPORATION
- Yuki NAKANO
- B24 - GRINDING POLISHING
Information Patent Application
WAFER POLISHING METHOD AND WAFER POLISHING DEVICE
- Publication number 20230330809
- Publication date Oct 19, 2023
- SUMCO CORPORATION
- Hiroki OTA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD, POLISHING APPARATUS, AND METHOD OF MANUFACTURING SE...
- Publication number 20220161388
- Publication date May 26, 2022
- SUMCO CORPORATION
- Yuki NAKANO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD, WAFER POLISHING APPARATUS USING THE SAME, AND WAFER...
- Publication number 20210331285
- Publication date Oct 28, 2021
- SUMCO CORPORATION
- Yuki NAKANO
- B24 - GRINDING POLISHING