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Yuki Ojima

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  • Hitachinaka, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Scanning electron microscope
    • Patent number 8,487,253
    • Issue date Jul 16, 2013
    • Hitachi High-Technologies Corporation
    • Minoru Yamazaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Scanning electron microscope
    • Patent number 8,080,790
    • Issue date Dec 20, 2011
    • Hitachi High-Technologies Corporation
    • Minoru Yamazaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Observation method with electron beam
    • Patent number 7,723,681
    • Issue date May 25, 2010
    • Hitachi High-Technologies Corporation
    • Yuki Ojima
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Method of monitoring an exposure process
    • Patent number 6,929,892
    • Issue date Aug 16, 2005
    • Hitachi High-Technologies Corporation
    • Chie Shishido
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents