Yuki ONODERA

Person

  • Miyagi, JP

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD, PRECOAT METHOD, AND ETCHING APPARATUS

    • Publication number 20250239476
    • Publication date Jul 24, 2025
    • TOKYO ELECTRON LIMITED
    • Takamitsu TAKAYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20250006473
    • Publication date Jan 2, 2025
    • TOKYO ELECTRON LIMITED
    • Yuki ONODERA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS

    • Publication number 20240347325
    • Publication date Oct 17, 2024
    • TOKYO ELECTRON LIMITED
    • Yuki ONODERA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CLEANING METHOD AND PLASMA PROCESSING METHOD

    • Publication number 20240087858
    • Publication date Mar 14, 2024
    • TOKYO ELECTRON LIMITED
    • Junichi SASAKI
    • H01 - BASIC ELECTRIC ELEMENTS