Yuki WADA

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 11,656,126
- Issue date May 23, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 10,533,896
- Issue date Jan 14, 2020
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220293439
- Publication date Sep 15, 2022
- TOKYO ELECTRON LIMITED
- Yuki WADA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Heat Treatment Apparatus and Temperature Control Method
- Publication number 20200080895
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Kazuteru OBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASURING METHOD AND HEAT PROCESSING APPARATUS
- Publication number 20170003171
- Publication date Jan 5, 2017
- TOKYO ELECTRON LIMITED
- Yuki WADA
- G01 - MEASURING TESTING
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20160379897
- Publication date Dec 29, 2016
- TOKYO ELECTRON LIMITED
- Kazuteru OBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...