Yuki Yoshida

Person

Koshi-shi, Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system, substrate cleaning method, and recordi...
- Patent number 10,792,711
- Issue date Oct 6, 2020
- Tokyo Electron Limited
- Meitoku Aibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate cleaning method, and recordi...
- Patent number 10,272,478
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Meitoku Aibara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,192,758
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,121,646
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Koji Kagawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,870,914
- Issue date Jan 16, 2018
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method and recording medium
- Patent number 9,818,598
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Meitoku Aibara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 9,805,957
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,768,039
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and nozzle cleaning method
- Patent number 9,764,345
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Yoshihiro Kai
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...
- Publication number 20190118227
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Meitoku AIBARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180082831
- Publication date Mar 22, 2018
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180012781
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20170047219
- Publication date Feb 16, 2017
- TOKYO ELECTRON LIMITED
- Kazuyoshi Shinohara
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170040154
- Publication date Feb 9, 2017
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...
- Publication number 20160035561
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Meitoku AIBARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND RECORDING MEDIUM
- Publication number 20160035564
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Meitoku AIBARA
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20140373877
- Publication date Dec 25, 2014
- Shigehisa Inoue
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20140360536
- Publication date Dec 11, 2014
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD
- Publication number 20140352730
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Yoshihiro Kai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140137902
- Publication date May 22, 2014
- TOKYO ELECTRON LIMITED
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS

Yuki Yoshida

Person

Patents Grantslast 30 patents

Substrate processing system, substrate cleaning method, and recordi...

Substrate processing system, substrate cleaning method, and recordi...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate cleaning method and recording medium

Substrate processing apparatus, substrate processing method and com...

Substrate processing apparatus

Substrate processing apparatus and nozzle cleaning method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...

SUBSTRATE CLEANING METHOD AND RECORDING MEDIUM

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...

SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS