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Yukichi Koji
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Otsu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Etching solution for copper or copper alloy
Patent number
10,570,522
Issue date
Feb 25, 2020
Entegris, Inc.
Yutaka Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching agent for copper or copper alloy
Patent number
9,790,600
Issue date
Oct 17, 2017
Entegris, Inc.
Tsutomu Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning agent for semiconductor provided with metal wiring
Patent number
9,476,019
Issue date
Oct 25, 2016
Advanced Technology Materials, Inc.
Mutsumi Nakanishi
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Etching agent for copper or copper alloy
Patent number
9,175,404
Issue date
Nov 3, 2015
Advanced Technology Materials, Inc.
Tsutomu Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning agent for semiconductor provided with metal wiring
Patent number
9,045,717
Issue date
Jun 2, 2015
Advanced Technology Materials, Inc.
Mutsumi Nakanishi
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
Information
Patent Application
ETCHING AGENT FOR COPPER OR COPPER ALLOY
Publication number
20160053383
Publication date
Feb 25, 2016
Advanced Technology Materials, Inc.
Tsutomu KOJIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CLEANING AGENT FOR SEMICONDUCTOR PROVIDED WITH METAL WIRING
Publication number
20150259632
Publication date
Sep 17, 2015
Advanced Technology Materials, Inc.
Mutsumi NAKANISHI
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
ETCHING AGENT FOR COPPER OR COPPER ALLOY
Publication number
20140238953
Publication date
Aug 28, 2014
Tsutomu Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING SOLUTION FOR COPPER OR COPPER ALLOY
Publication number
20130270217
Publication date
Oct 17, 2013
Advanced Technology Materials, Inc.
Yutaka Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CLEANING AGENT FOR SEMICONDUCTOR PROVIDED WITH METAL WIRING
Publication number
20130203643
Publication date
Aug 8, 2013
Advanced Technology Materials, Inc.
Mutsumi Nakanishi
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...