Yukie MINEKAWA

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Koshi-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,734,251
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Koji Takayanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure method and storage medium
- Patent number 10,274,843
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Seiji Nagahara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND STORAGE MEDIUM
- Publication number 20180143540
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Seiji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20140174475
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Koji TAKAYANAGI
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...